1.

Conference Proceedings
Conference Proceedings
1. Hyper-numerical aperture imaging challenges for 193 nm
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Use of Diode Diagnostics for Silicon Wafer Quality Characterization: Effect of COP on PN Junction Leakage*
Kubota, H. ; Nagano, H. ; Sugamoto, J. ; Matsushita, H. ; Momose, M. ; Nitta, S. ; Samata, S. ; Tsuchiya, N.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.634-645,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
3.

Conference Proceedings
Conference Proceedings
3. Dual Layer Corrosion Protective Film Formed on Si Bearing Austenitic Stainless Steel in Highly Oxidizing Nitric Acid
Kajimura, H. ; Usuki, N. ; Nagano, H.
Pub. info.: Proceedings of the Symposium on Passivity and its Breakdown.  pp.332-343,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-26
4.

Conference Proceedings
Conference Proceedings
4. Effect of Atomic-Hydrogen Treatment of(001)GaAs Sbustrate at "High Temperatures" on rf Plasma-Assisted Molecular-Beam Epitaxy of Cubic GaN
Yokshikawa, A. ; Nagano, H. ; Qin, Z. X. ; Sugure, Y. ; Jia, A. W. ; Kobayashi, M. ; Shimotomai, M. ; Kato, Y. ; Takahashi, K.
Pub. info.: Nitride semiconductors : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.227-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 482
5.

Conference Proceedings
Conference Proceedings
5. High-Resolution X-ray-Diffraction Analysis of "Device-Quality" Cubic GaN Grown on (001)GaAs Substrate Prepared by Atomic-Hydrogen Treatment at High Temperatures
Yoshikawa, A. ; Qin, Z. X. ; Nagano, H. ; Sugure, Y. ; Jia, A. W. ; Kobayashi, M. ; Shimotomai, M. ; Kato, Y. ; Takahashi, K.
Pub. info.: Nitride semiconductors : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A..  pp.465-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 482
6.

Conference Proceedings
Conference Proceedings
6. IN-PROCESS DIAGNOSTIC SYSTEM FOR SEMICONDUCTOR MATERIALS USING UHV WAFER TRANSFER CHAMBER
Uchida, F. ; Matsui, M. ; Kakibayashi, H. ; Kouguchi, M. ; Mutoh, A. ; Nagano, H.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.293-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
7.

Conference Proceedings
Conference Proceedings
7. Spectroscopic sensing using a visible arrayed-waveguide grating [5867-13]
Komai, Y. ; Nagano, H. ; Okamoto, K. ; Kodate, K.
Pub. info.: Optical Modeling and Performance Predictions II.  pp.58670D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5867
8.

Conference Proceedings
Conference Proceedings
8. Highly durable 4-kHz ArF excimer laser G42A for sub-90-nm lithography
Saito, T. ; Inoue, H. ; Nagano, H. ; Yoshino, M. ; Wakabayashi, O. ; Nohdomi, R. ; Nishisaka, T. ; Sumitani, A. ; Tomaru, H. ; Mizoguchi, H.
Pub. info.: Optical Microlithography XVII.  pp.1727-1734,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377