Vasanth, K. ; Apte, P. ; Davis, J. ; Saxena, S. ; Burch, R. ; Rao, S. ; Mozumder, P. K.
Pub. info.:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.325-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Vasanth, K. ; Apte, P. ; Davis, J. ; Saxena, S. ; Burch, R. ; Rao, S. ; Mozumder, P. K.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.253-, 1998. Warrendale, Pa.. MRS - Materials Research Society