Mouroux, A. ; Palmans, R. ; Keinonen, J. ; Zhang, S.-L. ; Maex, K. ; Petersson, C. S.
Pub. info.:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.365-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.53-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Gergaud, P. ; Thomas, O. ; Chenevier, B. ; Ghetta, V. ; Mouroux, A. ; Zhang, S.L.
Pub. info.:
Polycrystalline metal and magnetic thin films-2000 : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.G8.3-, 2001. Warrendale, PA. Materials Research Society
Mouroux, A. ; Zhang, S.-L. ; Kaplan, W. ; Nygren, S. ; Ostling, M. ; Petersson, C. S.
Pub. info.:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.511-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society