1.

Conference Proceedings
Conference Proceedings
1. Impact of Rapid Thermal Annealing of Ti-TiN Bilayers on Subsequent Chemical Vapor Deposition of Tungsten
Mouroux, A. ; Palmans, R. ; Keinonen, J. ; Zhang, S.-L. ; Maex, K. ; Petersson, C. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.365-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
2.

Conference Proceedings
Conference Proceedings
2. Interdiffusion and Phase Formation During Thermal Annealing of Ti/Mo Bilayers on Si Substrates
Mouroux, A. ; Zhang, S.-L. ; Kaplan, W. ; Nygren, S. ; Ostling, M. ; Petersson, C. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.511-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427