1.
|
Conference Proceedings
|
Kubo, S. ; Hiruta, K. ; Sugiyama, M. ; Iwamatsu, T. ; Fujisawa, T. ; Morimoto, H.
Pub. info.: |
Photomask and X-Ray Mask Technology VI. pp.426-435, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3748 |
|
2.
|
Conference Proceedings
|
Fujisawa, T. ; Iwamatsu, T. ; Hiruta, K. ; Morimoto, H. ; Sasaki, T. ; Yamashiro, K.
Pub. info.: |
Photomask and X-Ray Mask Technology VI. pp.147-152, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3748 |
|