1.

Conference Proceedings
Conference Proceedings
1. Control of Stress With Growth Conditions and Mechanical Parameters Determination of 3C-SiC Heteroepitaxial Thin Films
Gourbeyre, C. ; Chassagne, T ; Berre, M. Le ; Ferro, G. ; Malhaire, C. ; Monteil, Y. ; Bardier, D.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 657
2.

Conference Proceedings
Conference Proceedings
2. SiC Thin Film Characterization and Stress Measurements for High-Temperature Sensors Applications
Gourbeyre, C. ; Aboughe-nze, P. ; Malhaire, C. ; Berre, M. ; Monteil, Y. ; Barbier, D.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.91-96,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546