Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.549-558, 1994. Pennington, NJ. Electrochemical Society
Li, J. ; Moinpour, M. ; Fardi, B. ; Lee, J. ; Thach, D. ; Lawrence, M. ; Dass, A. ; Moghadam, F.
Pub. info.:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.31-39, 1994. Pennington, NJ. Electrochemical Society
Watt, V.H.C. ; Bower, R. ; Chan, W. ; Hong, L. ; Moinpour, M.
Pub. info.:
Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications. pp.573-578, 1995. Pennington, NJ. Electrochemical Society
Watt, V.H.C. ; Nakatani, D. ; Moinpour, M. ; Hwang, D. ; Lu, W.
Pub. info.:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.328-337, 1994. Pennington, NJ. Electrochemical Society
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.713-718, 1992. Pittsburgh, Pa.. Materials Research Society
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.276-284, 1994. Pennington, NJ. Electrochemical Society
Maxim, M. ; Moinpour, M. ; Chu, J. ; Nguyen, H. ; Freiberger, P. ; Stenton, N.
Pub. info.:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.289-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Philipossian, A. ; Moinpour, M. ; Wilkinson, R. ; Watt, V. H. C.
Pub. info.:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.75-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.243-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Watt, V. H. C. ; Moinpour, M. ; Sadjadi, R. ; Lu, W. ; Neubauer, G. ; Bower, R.
Pub. info.:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA. pp.377-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Rojhantalab, H. ; Moinpour, M. ; Peter, N. ; Dass, M.L.A. ; Hough, W. ; Natter, R. ; Moghadam, F.
Pub. info.:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.147-152, 1993. Pittsburgh, Pa.. Materials Research Society
DeNardis, D. ; Choi, H. ; Kim, A. ; Moinpour, M. ; Oehler, A.
Pub. info.:
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.159-166, 2005. Warrendale, Pa.. Materials Research Society
Kondoju, S. ; Juncker, C. ; Lucas, P. ; Raghavan, S. ; Fischer, P. ; Moinpour, M. ; Oehler, A.
Pub. info.:
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.175-182, 2005. Warrendale, Pa.. Materials Research Society
Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.101-110, 2003. Warrendale, Pa.. Materials Research Society
Sorooshian, A. ; Ashwani, R. ; Choi, H.K. ; Moinpour, M. ; Oehler, A. ; Tregub, A.
Pub. info.:
Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.125-132, 2004. Warrendale, Pa.. Materials Research Society
Rafalski, S. A. ; Spreitzer, R. L. ; Russell, S. W. ; Alford, T. L. ; Li, J. ; Moinpour, M. ; Moghadam, F. ; Mayer, J. W.
Pub. info.:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.613-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Moinpour, M. ; Lu, W.-J. ; Sadjadi, R. ; Li, J. ; Moghadam, F. ; Wada, O. ; Watt, V.H.C.
Pub. info.:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.101-108, 1995. Pennington, NJ. Electrochemical Society