1.

Conference Proceedings
Conference Proceedings
1. Dynamic Moisture Absorption Characterization Of TEOS/Ozone APCVD Si02 Films
Moinpour, M. ; Moghadam, F. ; Williams, B.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.549-558,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
2.

Conference Proceedings
Conference Proceedings
2. PARTICLE MONITORING IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION BPSG FILMS
Li, J. ; Moinpour, M. ; Fardi, B. ; Lee, J. ; Thach, D. ; Lawrence, M. ; Dass, A. ; Moghadam, F.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III.  pp.31-39,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-9
3.

Conference Proceedings
Conference Proceedings
3. Direct Bonding of LPCVD Silicon Oxide Thin Films Deposited from N2O and SiH4
Watt, V.H.C. ; Bower, R. ; Chan, W. ; Hong, L. ; Moinpour, M.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.573-578,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
4.

Conference Proceedings
Conference Proceedings
4. Characterization Of Silicon Dioxide Films Deposited In A Vertical Diffusion Furnace For Medium Temperature Applications
Watt, V.H.C. ; Nakatani, D. ; Moinpour, M. ; Hwang, D. ; Lu, W.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.328-337,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
5.

Conference Proceedings
Conference Proceedings
5. POLYSILICON/SILICON INTERFACES: EFFECT OF PROCESSING PARAMETERS ON PHYSICAL AND ELECTRICAL PROPERTIES
Srikrishna, K. ; Moinpour, M. ; Landau, B.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.713-718,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
6.

Conference Proceedings
Conference Proceedings
6. In-Situ Reactor Analysis For Silicon Nitride And Silicon Dioxide Thin Films: Current Status And Future Challenges
Moinpour, M.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.276-284,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
7.

Conference Proceedings
Conference Proceedings
7. BOROPHOSPHOSILICATE GLASS (BPSG) FUSION USING RAPID THERMAL ANNEALING AND STEAM REFLOW: PHYSICAL PROPERTIES AND DEVICE IMPLICATIONS
Maxim, M. ; Moinpour, M. ; Chu, J. ; Nguyen, H. ; Freiberger, P. ; Stenton, N.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.289-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
8.

Conference Proceedings
Conference Proceedings
8. Investigation of Pre-Tungsten Silicide Deposition Wet Chemical Processing
Philipossian, A. ; Moinpour, M. ; Wilkinson, R. ; Watt, V. H. C.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.75-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386
9.

Conference Proceedings
Conference Proceedings
9. Current Issues and Future Trends in CMP Consumables for Oxide and Metal Polish
Moinpour, M. ; Philipossian, A.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.243-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
10.

Conference Proceedings
Conference Proceedings
10. SURFACE ROUGHNESS INVESTIGATION OF THIN SiO2 FILMS DEPOSITED FROM N2O AND SiH4
Watt, V. H. C. ; Moinpour, M. ; Sadjadi, R. ; Lu, W. ; Neubauer, G. ; Bower, R.
Pub. info.: Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA.  pp.377-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 355
11.

Conference Proceedings
Conference Proceedings
11. AFM STUDIES OF SURFACE ROUGHNESS OF BOROPHOSPHOSILICATE GLASS (BPSG) FILMS AND THEIR IMPACT ON DEFECT DETECTION CAPABILITY FOR SUB MICRON VLSI TECHNOLOGY
Rojhantalab, H. ; Moinpour, M. ; Peter, N. ; Dass, M.L.A. ; Hough, W. ; Natter, R. ; Moghadam, F.
Pub. info.: Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.147-152,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 280
12.

Conference Proceedings
Conference Proceedings
12. Investigating the Effects of Diluting Solutions and Trace Metal Contamination on Aggregation Characteristics of Silica-Based ILD CMP Slurries
DeNardis, D. ; Choi, H. ; Kim, A. ; Moinpour, M. ; Oehler, A.
Pub. info.: Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A..  pp.159-166,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 867
13.

Conference Proceedings
Conference Proceedings
13. Feasibility of Detecting Barrier Layer to Low-K Transition in Copper CMP Using Raman Spectroscopy
Kondoju, S. ; Juncker, C. ; Lucas, P. ; Raghavan, S. ; Fischer, P. ; Moinpour, M. ; Oehler, A.
Pub. info.: Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A..  pp.175-182,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 867
14.

Conference Proceedings
Conference Proceedings
14. Pad Degradation During CMP Process: Effect of Soak in Slurry and Water on Thermal and Mechanical Properties of the CMP Pads
Tregub, A. ; Ng, G. ; Moinpour, M.
Pub. info.: Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.101-110,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 767
15.

Conference Proceedings
Conference Proceedings
15. Effect of Particle Interaction on Agglomeration of Silica-Based CMP Slurries
Sorooshian, A. ; Ashwani, R. ; Choi, H.K. ; Moinpour, M. ; Oehler, A. ; Tregub, A.
Pub. info.: Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.125-132,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 816
16.

Conference Proceedings
Conference Proceedings
16. ENHANCED ADHESION OF COPPER FILMS TO SiO2, PSG AND BPSG BY REFRACTORY METAL ADDITIONS
Rafalski, S. A. ; Spreitzer, R. L. ; Russell, S. W. ; Alford, T. L. ; Li, J. ; Moinpour, M. ; Moghadam, F. ; Mayer, J. W.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.613-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337
17.

Conference Proceedings
Conference Proceedings
17. IMPLICATIONS OF SURFACE CONTAMINANTS IN A BPSG DEPOSITION AND REFLOW PROCESS
Moinpour, M. ; Leitch, R. ; Li, J. ; Thach, D. ; Moghadam, F.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.117-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
18.

Conference Proceedings
Conference Proceedings
18. TEOS/Ozone APCVD Thin SiO2 Sub 0.5 mm LDD Spacer Applications
Moinpour, M. ; Lu, W.-J. ; Sadjadi, R. ; Li, J. ; Moghadam, F. ; Wada, O. ; Watt, V.H.C.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.101-108,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5