1.

Conference Proceedings
Conference Proceedings
1. Direct Bonding of LPCVD Silicon Oxide Thin Films Deposited from N2O and SiH4
Watt, V.H.C. ; Bower, R. ; Chan, W. ; Hong, L. ; Moinpour, M.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.573-578,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
2.

Conference Proceedings
Conference Proceedings
2. Characterization Of Silicon Dioxide Films Deposited In A Vertical Diffusion Furnace For Medium Temperature Applications
Watt, V.H.C. ; Nakatani, D. ; Moinpour, M. ; Hwang, D. ; Lu, W.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.328-337,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
3.

Conference Proceedings
Conference Proceedings
3. TEOS/Ozone APCVD Thin SiO2 Sub 0.5 mm LDD Spacer Applications
Moinpour, M. ; Lu, W.-J. ; Sadjadi, R. ; Li, J. ; Moghadam, F. ; Wada, O. ; Watt, V.H.C.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.101-108,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5