Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.549-558, 1994. Pennington, NJ. Electrochemical Society
Li, J. ; Moinpour, M. ; Fardi, B. ; Lee, J. ; Thach, D. ; Lawrence, M. ; Dass, A. ; Moghadam, F.
Pub. info.:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.31-39, 1994. Pennington, NJ. Electrochemical Society
Rojhantalab, H. ; Moinpour, M. ; Peter, N. ; Dass, M.L.A. ; Hough, W. ; Natter, R. ; Moghadam, F.
Pub. info.:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.147-152, 1993. Pittsburgh, Pa.. Materials Research Society
Rafalski, S. A. ; Spreitzer, R. L. ; Russell, S. W. ; Alford, T. L. ; Li, J. ; Moinpour, M. ; Moghadam, F. ; Mayer, J. W.
Pub. info.:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.613-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Moinpour, M. ; Lu, W.-J. ; Sadjadi, R. ; Li, J. ; Moghadam, F. ; Wada, O. ; Watt, V.H.C.
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ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.101-108, 1995. Pennington, NJ. Electrochemical Society