1.

Conference Proceedings
Conference Proceedings
1. Direct Bonding of LPCVD Silicon Oxide Thin Films Deposited from N2O and SiH4
Watt, V.H.C. ; Bower, R. ; Chan, W. ; Hong, L. ; Moinpour, M.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.573-578,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
2.

Conference Proceedings
Conference Proceedings
2. SURFACE ROUGHNESS INVESTIGATION OF THIN SiO2 FILMS DEPOSITED FROM N2O AND SiH4
Watt, V. H. C. ; Moinpour, M. ; Sadjadi, R. ; Lu, W. ; Neubauer, G. ; Bower, R.
Pub. info.: Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA.  pp.377-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 355