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Conference Proceedings

1. Dielectric Constant and Stability of Fluorine Doped PECVD Silicon Oxide Thin Films

Mizuno, S. ; Verma, A. ; Tran, H. ; Lee, P. ; Nguyen, B.

Pub. info.:	ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.354-364, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-5

Conference Proceedings

2. Improved Gap-Filling Capability of Fluorine-Doped PECVD Silicon Oxide Thin Film

Mizuno, S. ; Verma, A. ; Lee, P. ; Nguyen, B.

Pub. info.:	ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.318-326, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-5