Makimura, T. ; Kenmotsu, Y. ; Miyamoto, H. ; Mori, M. ; Kondo, K. ; Murakami, K.
Pub. info.:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.107-112, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering