Reimbold, G. ; Mitard, J. ; Casse, M. ; Garros, X. ; Leroux, C. ; Thevenod, L. ; Martin, F.
Pub. info.:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.437-455, 2005. Pennington, N.J.. Electrochemical Society