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13 results

Conference Proceedings

1. Development of a figure correction method having spatial resolution close to 0.1 mm

Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.

Pub. info.:	Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA. pp.105-111, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5193

Conference Proceedings

2. Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy

Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Shimura, M. ; Ishizaka, Y.

Pub. info.:	Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA. pp.11-17, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5193

Conference Proceedings

3. Hard x-ray nano-focusing of 40nm level using K-B mirror optics for nanoscopy/spectroscopy [5918-05]

Matsuyama, S. ; Mimura, H. ; Yumoto, H. ; Hara, H. ; Yamamura, K. ; Sano, Y. ; Endo, K. ; Mori, Y. ; Nishino, Y. ; Tamasaku, K. ; Yabashi, M. ; Tshikawa, T. ; Yamauchi, K.

Pub. info.:	Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA. pp.591804-591804, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5918

Conference Proceedings

4. High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors [6317-48]

Matsuyama, S. ; Mimura, H. ; Shimura, M. ; Yumoto, H. ; Katagishi, K. ; Handa, S. ; Shibatani, A. ; Sano, Y. ; Yamamura, K. ; Nishino, Y. ; Tamasaku, K. ; Yabashi, M. ; Ishikawa, T. ; Yamauchi, K.

Pub. info.:	Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.631719-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6317

Conference Proceedings

5. Wave-optical simulations for designing and evaluating hard x-ray reflective optics [6317-47]

Mimura, H. ; Matsuyama, S. ; Yumoto, H. ; Handa, S. ; Shibatani, A. ; Katagishi, K. ; Sano, Y. ; Nishino, Y. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Yamauchi, K.

Pub. info.:	Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.631718-631718, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6317

Conference Proceedings

6. Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror frabrication [5921-24]

Mimura, H. ; Yumoto, H. ; Matsuyama, S. ; Yamamura, K. ; Sano, Y. ; Endo, K. ; Mori, Y. ; Nishino, Y. ; Tabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Yamauchi, Y.

Pub. info.:	Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA. pp.59210M-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5921

Conference Proceedings

7. At-wavelength figure metrology of total reflection mirrors in hard x-ray region (Invited Paper) [6317-09]

Yumoto, H. ; Mimura, H. ; Matsuyama, S. ; Handa, S. ; Shibatani, A. ; Katagishi, K. ; Sano, Y. ; Yabashi, M. ; Nishino, Y. ; Tamasaku, K. ; Ishikawa, T. ; Yamauchi, K.

Pub. info.:	Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.631709-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6317

Conference Proceedings

8. Aspheric surface fabrication in nanometer-level accuracy by numerically controlled plasma chemical vaporization machining (CVM) and elastic emission machining (EEM)

Yamamura, K. ; Mimura, H. ; Yamauchi, K. ; Sano, Y. ; Saito, A. ; Kinoshita, T. ; Endo, K. ; Mori, Y. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.

Pub. info.:	X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA. pp.265-270, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4782

Conference Proceedings

9. Wave-optical analysis of submicron focusing of hard x-ray beams by reflective optics

Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Kanaoka, M. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Mori, Y.

Pub. info.:	X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA. pp.271-276, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4782

10.

Conference Proceedings

10. Submicron focusing of hard x-ray beam by elliptically figured mirrors for scanning x-ray microscopy

Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Ueno, K. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.

Pub. info.:	X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA. pp.58-64, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4782

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