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Conference Proceedings

1. Progress of the MMT adaptive optics program

Wildi,F.P. ; Brusa,G. ; Riccardi,A. ; Allen,R.G. ; Lloyd-Hart,M. ; Miller,D. ; Martin,B. ; Biasi,R. ; Gallieni,D.

Pub. info.:	Adaptive optics systems and technology II : 30 July-1 August 2001, San Diego, USA. pp.11-18, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4494

Conference Proceedings

2. Behavior of SMA actuators under nonproportional thermomechanical loading

Bo,Z. ; Lagoudas,D.C. ; Miller,D.

Pub. info.:	Smart structures and materials 1998 : mathematics and control in smart structures : 2-5 March 1998, San Diego, California. pp.312-321, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3323

Conference Proceedings

3. Electrical critical dimension metrology for 100-nm Iinewidths and below

Grenville,A. ; Coombs,B. ; Hutchinson,J.M. ; Kuhn,K.J. ; Miller,D. ; Troccolo,P.M.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part1 pp.452-459, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000