1.

Conference Proceedings
Conference Proceedings
1. STRUCTURAL AND ELECTRICAL PROPERTIES OF UNDOPED MICROCRYSTALLINE SILICON GROWN BY 70 MHz AND 13.56 MHz PECVD
Fluckiger, R. ; Meier, J. ; Crovini, G. ; Demichelis, F. ; Giorgis, F. ; Pirri, C. F. ; Tresso, E. ; Pohl, J. ; Rigato, V. ; Zandolin, S. ; Caccavale, F.
Pub. info.: Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.751-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 358
2.

Conference Proceedings
Conference Proceedings
2. Enlarged Parameter Space by Use of VHF-GD for Deposition of Thin <p> Type ｦﾌc-Si:H Films
Torres, P. ; Meier, J. ; Fluckiger, R. ; Keppner, H. ; Shah, A.
Pub. info.: Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.767-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 452