1.

Conference Proceedings
Conference Proceedings
1. Atomic-Order Nitridation of the H-Terminated and H-Free Si Surfaces by NH3
Watanabe, T. ; Ichikawa, A. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.97-104,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Atomic-Layer Nitridation of Si(l 00) By NH3 Using Flash Heating
Watanabe, T. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
Pub. info.: Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis.  pp.69-74,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-23
3.

Conference Proceedings
Conference Proceedings
3. Atomic-Order Layer Growth of Silicon Nitride Films at Low Temperatures
Watanabe, T. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.504-509,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5