1.
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Conference Proceedings
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Zavyalova, L.V. ; Smith, B.W. ; Suganaga, T. ; Matsuura, S. ; Itani, T. ; Cashmore, J.S.
Pub. info.: |
Optical Microlithography XVII. pp.172-184, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|
2.
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Conference Proceedings
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Watanabe, K. ; Hagiwara, T. ; Matsuura, S. ; Suganaga, T. ; Itani, T. ; Fujii, K.
Pub. info.: |
Optical Microlithography XVII. pp.537-544, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|
3.
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Conference Proceedings
|
Suganaga, T. ; Watanabe, K. ; Matsuura, S. ; Hagiwara, T. ; Furukawa, T. ; Itani, T. ; Fujii, K.
Pub. info.: |
Optical Microlithography XVII. pp.1616-1626, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|