1.

Conference Proceedings
Conference Proceedings
1. INVITED: HYDROGEN ANNEAL OF SILICON WAFER FORMATION OF HIGH QUALITY DEVICE ACTIVE LAYER
Matsushita, Y. ; Sanada, M. ; Tanabe, A. ; Takeda, R. ; Shimaoi, N. ; Kobayashi, K.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.683-697,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
2.

Conference Proceedings
Conference Proceedings
2. Hydrogen Annealing of Silicon Wafer
Samata, S. ; Numano, M. ; Amai, T. ; Matsushita, Y. ; Kobayashi, K. ; Yamamoto, A. ; Kawaguchi, T. ; Nadahara, S. ; Yamabe, K.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.101-110,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1