Nguyen, N.V. ; Maslar, J.E. ; Kim, Jin-Yong ; Han, Jin-Ping ; Park, Jin-Won ; Chandler-Horowitz, D. ; Vogel, E.M.
Pub. info.:
High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.127-132, 2004. Warrendale, Pa.. Materials Research Society
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.168-175, 2001. Pennington, N.J.. Electrochemical Society