1.

Conference Proceedings
Conference Proceedings
1. Device and lithography contextual mask rule generation
Ham, Y. M. ; Dillon, B. ; Progler, C. ; Goldammer, K. ; Jin, Z. ; Green, G. ; Mackay, R. S. ; Divecha, H. ; Boksha, V. ; Martin, P. ; Heins, M. ; Zhang, Y. ; Davis, K. ; Marutyan, R. ; Martirosyan, K. ; Bakarian, S.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.319-330,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Conference Proceedings
Conference Proceedings
2. The effect of polarized 193nm irradiation on photomask haze formation
Kim, Y. D. ; Kang, H. B. ; Zhang, Y. ; Tran, C. ; Farrar, N. ; Qin, J. ; Rockwell, B. ; Cho, H. J. ; Cottle, R. ; Chan, D. ; Martin, P. ; Choi, S. S. ; Progler, C.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1586-1590,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings
Conference Proceedings
3. A films based approach to intensity imbalance correction for 65 nm node c:PSM [5992-19]
Cottle, R. ; Sixt, P. ; Lassiter, M. ; Cangemi, M. ; Martin, P. ; Progler, C.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920J-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
4.

Conference Proceedings
Conference Proceedings
4. Optical properties and process impacts of high transmission EAPSM [6154-40]
Ham, Y. M. ; Morgana, N. ; Sixt, P. ; Cangemin, M. ; Kasprowicz, B. ; Progler, C. ; Martin, P.
Pub. info.: Optical Microlithography XIX.  pp.615413-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154