1.
Conference Proceedings
Ivin,V.V. ; Lucas,K.D. ; Makhviladze,T.M. ; Manuilov,V.V. ; Medvedeva,M.G
Pub. info.:
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California . pp.646-654, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3331
2.
Conference Proceedings
Ivin,V.V. ; Larin,D.Yu. ; Lucas,K.D. ; Makhviladze,T.M. ; Rogov,A.A. ; Verzunov,S.V.
Pub. info.:
Optical Microlithography X . pp.567-577, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
3.
Conference Proceedings
Lucas,K.D. ; Ivin,V.V. ; Kudrja,V.P. ; Larin,D.Yu. ; Makhviladze,T.M. ; Medvedeva,M.G. ; Rogov,A.A. ; Verzunov,S.V. ; Yang,D.C.
Pub. info.:
Optical Microlithography IX . Part1 pp.348-359, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726