1.

Conference Proceedings
Conference Proceedings
1. Microstructure of Mo/Si multilayers with barrier layers
Braun, S. ; Mai, H. ; Moss, M. ; Scholz, R.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.185-195,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782
2.

Conference Proceedings
Conference Proceedings
2. New laboratory EUV reflectometer for large optics using a laser plasma source
Loyen, L. ; Boettger, T. ; Braun, S. ; Mai, H. ; Leson, A. ; Scholze, F. ; Tuemmler, J. ; Ulm, G. ; Legall, H. ; Nickles, P.V. ; Sandner, W. ; Stiel, H. ; Rempel, C.E. ; Schulze, M. ; Brutscher, J. ; Macco, F. ; Muellender, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.12-21,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038