1.

Conference Proceedings

Conference Proceedings
M. Kittler ; M. Reiche ; W. Seifert ; X. Yu ; T. Arguirov ; O. Vyvenko ; T. Mchedlidze ; T. Wilhelm
Pub. info.: High purity silicon 9.  pp.429-450,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(4)
2.

Conference Proceedings

Conference Proceedings
M. Reiche ; M. Kittler ; T. Wilhelm ; T. Arguirov ; W. Seifert
Pub. info.: Semiconductor wafer bonding 9 : science, technology, and applications.  pp.311-319,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(6)
3.

Conference Proceedings

Conference Proceedings
M. Kittler ; M. Reiche ; T. Mchedlidze ; T. Arguirov ; G. Jia
Pub. info.: Silicon photonics III : 21-24 January 2008, San Jose, California, USA.  pp.68980G-1-68980G-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6898