1.

Conference Proceedings
Conference Proceedings
1. Growth Studies and Reaction Mechanism of the Atomic Layer Deposition of Hafnium Oxide
A. Debbie ; M. Caymax ; S. Brijs ; D. Brunco ; T. Conard ; E. Sleeckx ; L. Ragnarsson ; S. Van Elshocht ; S. De Gendt ; M. Heyns
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.433-446,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Atomic-Beam Deposited GeO₁₋xNx/HfO₂ Stacks on Ge
M. Houssa ; T. Conard ; J. Van Steenbergen ; G. Mavrou ; Y. Panayiotatos ; T. Dimaulas ; M. Meuris ; M. Caymax ; M. Heyns ; G. Nicholas
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.9-16,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)