1.

Conference Proceedings
Conference Proceedings
1. Substrate bias effect on preparation of nanocrystalline silicon carbide thin films in helicon wave plasma chemical vapor depostion [6029-34]
Yu W. ; Lu W. ; Wang C. ; Ding W. ; Fu G.
Pub. info.: ICO20 : materials and nanostructures : 21-26 August, 2005, Changchun, China.  pp.60290Y-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6029
2.

Conference Proceedings
Conference Proceedings
2. Thermal annealing effects on the optical properties of amorphous silicon carbide films deposited by pulsed laser ablation [6029-39]
Yu W. ; Lu W. ; Zhang L. ; Sun Y. ; Fu G.
Pub. info.: ICO20 : materials and nanostructures : 21-26 August, 2005, Changchun, China.  pp.602913-602913,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6029
3.

Conference Proceedings
Conference Proceedings
3. Effect of radio frequency bias on the optical and structural properties of nanocrystalline SiC films deposited by helicon wave plasma enhanced chemical vapor deposition [6020-122]
Yu W. ; Wang C. ; Lu W. ; Cui S. ; Fu G.
Pub. info.: Optoelectronic Materials and Devices for Optical Communications.  pp.60203D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6020
4.

Conference Proceedings
Conference Proceedings
4. Photoluminescene properties of hydrogenated amorphous silicon nitride thin films deposited by helicon wave plasma chemical vapor deposition [6020-123]
Fu G. ; Yu W. ; Lu W. ; Zhu H. ; Zhang L. ; Ding W.
Pub. info.: Optoelectronic Materials and Devices for Optical Communications.  pp.60203E-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6020