1.

Conference Proceedings
Conference Proceedings
1. Evaluation of IDEALSmile for 90-nm FLASH memory contact holes imaging with ArF scanner
Cantu, P. ; Capetti, G. ; Loi, S. ; Lupo, M. ; Pepe, A. ; Saitoh, K. ; Yamazoe, K. ; Hasegawa, Y. ; Iwasa, J. ; Toublan, O.R.
Pub. info.: Optical Microlithography XVII.  pp.859-871,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
2.

Conference Proceedings
Conference Proceedings
2. Customized illumination schemes for critical layers of 90-nm node dense memory devices in ArF lithography: comparison between simulation and experimental results
Capetti, G. ; Bollin, M. ; Pepe, A. ; Cotti, G. ; Loi, S. ; Iessi, U.
Pub. info.: Optical Microlithography XVII.  pp.881-893,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377