1.

Conference Proceedings
Conference Proceedings
1. Deposition of Low-k Dielectric Films Using Trimethylsilane
Loboda, M.J. ; Seifferly, J.A. ; Schneider, R.F. ; Grove, C.M.
Pub. info.: Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability.  pp.145-152,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-6
2.

Conference Proceedings
Conference Proceedings
2. Using Trimethylsilane to Improve Safety, Throughput and Versatility in PECVD processes
Loboda, M.J. ; Seifferly, J.A. ; Grove, C.M. ; Schneider, R.F.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.443-453,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10