1.

Conference Proceedings
Conference Proceedings
1. Characterization of Ashing Effects on Low-k Dielectric Films
Shepherd, R.A. ; Nguyen, D. ; Cerny, G. ; Loboda, M.J.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.159-167,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5
2.

Conference Proceedings
Conference Proceedings
2. The Influence of Temperature on the Deposition of Low-k Films by PECVD of Trimethylsilane
Hwang, B.K. ; Loboda, M.J. ; Cerny, G. ; Schneider, R. ; Seifferly, J.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.63-71,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5