1.

Conference Proceedings
Conference Proceedings
1. Highly Conformal Diffusion Barriers of Amorphous Niobium Nitride
Gordon, R. G. ; Liu, X. ; Broomhall-Dillard, R. N. R. ; Shi, Y.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.335-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
2.

Conference Proceedings
Conference Proceedings
2. Liquid compounds for CVD of alkaline earth metals
Gordon, R. G. ; Barry, S. T. ; Liu, X. ; Teff, D. J.
Pub. info.: Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A..  pp.23-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 574
3.

Conference Proceedings
Conference Proceedings
3. Improved Conformality of CVD Titanium Nitride Films
Liu, X. ; Lu, Y. Z. ; Gordon, R. G.
Pub. info.: Properties and processing of vapor-deposited coatings : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.135-,  1999.  Warrendale, PA..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 555