1.

Conference Proceedings
Conference Proceedings
1. A high-g overload-protected accelerometer with a novel microstructure
Chen, W. ; Wang, W. ; Tian, L. ; Liu, X. ; Huo, M. ; Zhang, R. ; Zhang, D.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.82-86,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641
2.

Conference Proceedings
Conference Proceedings
2. Simulation of bulk micromachined vibration sensor with low noise
Liu, X. ; Huo, M. ; Chen, W. ; Chen, Q.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.364-369,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116