1.

Conference Proceedings
Conference Proceedings
1. Plasma Ion Implantation for Flat Panel Displays
Chan, Chung ; Qin, Shu ; Zhou, Yuanzhong ; Liu, Wei ; Wu, Shuichi ; Vai, Mankuan Michael ; Bursuc, Ionel ; Shao, Jiqun ; Denholm, Stuart
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.321-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
2.

Conference Proceedings
Conference Proceedings
2. Short-Time Hydrogen Passivation of Poly-Si CMOS Thin Film Transistors by High Dose Rate Plasma Ion Implantation
Qin, Shu ; Bernstein, James D. ; Zhou, Yuanzhong ; Liu, Wei ; Chan, Chung ; King, Tsu-Jae
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.515-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396