Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.355-362, 2001. Pennington, NJ. Electrochemical Society
Oztiirk, M.C. ; Pesovic, N. ; Liu, J. ; Mo, H. ; Kang, I. ; Gannavaram, S.
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Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.761-773, 2002. Pennington, NJ. Electrochemical Society
Oztiirk, M.C. ; Pesovic, N. ; Liu, J. ; Mo, H. ; Kang, I. ; Gannavaram, S.
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Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.761-773, 2002. Pennington, NJ. Electrochemical Society
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Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.143-154, 2002. Warrendale, Pa.. Materials Research Society