1.

Conference Proceedings
Conference Proceedings
1. Three-dimensional rigorous simulation of mask-induced polarization
Zhou, W. ; Yu, J. ; Lo, J. ; Liu, J. ; Tjhin, H. ; Dziura, T. G.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.567-575,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Proximity matching for 1 93nm scanner using scatterometry
Zhou, W. ; Yu, J. ; Lo, J. ; Liu, J. ; Tjhin, H. ; Dziura, T. G.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1249-1259,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings
Conference Proceedings
3. Lithography process window analysis with calibrated model
Zhou, W. ; Yu, J. ; Lo, J. ; Liu, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.721-726,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375