Oztiirk, M.C. ; Pesovic, N. ; Liu, J. ; Mo, H. ; Kang, I. ; Gannavaram, S.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.761-773, 2002. Pennington, NJ. Electrochemical Society
Oztiirk, M.C. ; Pesovic, N. ; Liu, J. ; Mo, H. ; Kang, I. ; Gannavaram, S.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.761-773, 2002. Pennington, NJ. Electrochemical Society
Ozturk, M.C. ; Pesovic, N. ; Liu, J. ; Mo, H. ; Kang, I. ; Gannavaram, S.
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.143-154, 2002. Warrendale, Pa.. Materials Research Society