Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.116-126, 1996. Pennington, NJ. Electrochemical Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.183-188, 2004. Warrendale, Pa.. Materials Research Society
Crosby, R.T. ; Radic, L. ; Jones, K.S. ; Law, M.E. ; Thompson, P.E. ; Liu, J. ; Klimov, M. ; Craciun, V.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.313-318, 2004. Warrendale, Pa.. Materials Research Society