1.

Conference Proceedings
Conference Proceedings
1. Low-k Mesoporous Silica Films Through Template-Based Processing
Bruinsma, P. J. ; Hess, N. J. ; Bontha, J. R. ; Liu, J. ; Baskaran, S.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.105-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443
2.

Conference Proceedings
Conference Proceedings
2. Preparation of Continuous Mesoporous Films on Porous and Dense Substrates
Liu, J. ; Bontha, J. R. ; Kim, A. Y. ; Baskaran, S.
Pub. info.: Microporous and macroporous materials.  pp.245-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 431
3.

Conference Proceedings
Conference Proceedings
3. Ultra Low-k Mesoporous Silica Films: Synthesis, Film Properties And One-Level Copper Damascene Evaluation
Jin, C. ; Liu, J. ; Li, X. ; Coyle, C. ; Birnbaum, J. ; Fryxell, G.E. ; Williford, R.E. ; Baskaran, S.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D4.5-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612