Lisker, M. ; Silinskas, M. ; Kalkofen, B. ; Burte, E. P.
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.426-434, 2005. Pennington, NJ. Electrochemical Society
Huryeva, T. ; Lisker, M. ; Silinskas, M. ; Burte, E. P. ; Kalkofen, B. ; Matichyn, S.
Pub. info.:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.683-690, 2005. Pennington, NJ. Electrochemical Society