1.

Conference Proceedings
Conference Proceedings
1. Control of stresses in highly doped multilayer polysilicon structures used in MEMS applications
Chen,L. ; Guo,L. ; Miao,J.M. ; Lin,R.
Pub. info.: Smart materials.  pp.232-238,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4234
2.

Conference Proceedings
Conference Proceedings
2. Design considerations in micromachined silicon microphones
Miao,J. ; Lin,R. ; Chen,L. ; Zou,Q. ; Lim,S.Y. ; Seah,S.H.
Pub. info.: Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore.  pp.309-314,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4228