1.

Conference Proceedings
Conference Proceedings
1. Gettering of Cu to voids induced by H+ implantation in SIMOX substrate
Zhang, M. ; Lin, C. ; Hemment, P.L.F. ; Gutjahr, K. ; Goesele, U.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.86-91,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
2.

Conference Proceedings
Conference Proceedings
2. Defects and Strain in Hydrogen and Helium Co-Implanted Silicon
Duo, X. ; Liu, W. ; Zhang, M. ; Wang, S.X. ; Wang, L.M. ; Lin, C.
Pub. info.: Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium.  pp.69-74,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-3
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of SiGe-on-insulator and applications for strained Si (Invited Paper)
Lin, C. ; Liu, W. ; An, Z. ; Di, Z. ; Zhang, M.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.136-141,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774
4.

Conference Proceedings
Conference Proceedings
4. Relaxation mechanism of SiGe thin film on SOI substrate
Di, Z. ; Zhang, M. ; Liu, W. ; Zhu, M. ; Lin, C. ; Chu, P. K.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.611-615,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774
5.

Conference Proceedings
Conference Proceedings
5. Studies on novel SOI-structure with MN film as buried insulator
Lin, C. ; Zhu, M. ; Men, C. ; An, Z. ; Zhang, M.
Pub. info.: Silicon-on-insulator technology and devices XI : proceedings of the international symposium.  pp.51-56,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-5