Tompa, G. S. ; Shen, D. ; Zhang, C. ; Murzin, I. H. ; Gallois, B. ; Liang, S. ; Gorla, C. R. ; Chen, Y.
Pub. info.:
Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A.. pp.167-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society