1.

Conference Proceedings
Conference Proceedings
1. Four-inch photocurable nanoimprint lithography using NX-2000 nanoimprinter
Li, M. ; Tan, H. ; Kong, L. ; Koecher, L.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.209-212,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374
2.

Conference Proceedings
Conference Proceedings
2. Current status of Nanonex nanoimprint solutions
Tan, H. ; Kong, L. ; Li, M. ; Steere, C. ; Koecher, L.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.213-221,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374