ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China. pp.60320H-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Zhou, -F. Z. ; Huang, -A. Q. ; Li, -H. W. ; Lu, W. ; Southeast Univ. (China)
Pub. info.:
ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China. pp.60320F-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China. pp.60320G-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering