1.

Conference Proceedings
Conference Proceedings
1. Vortex via process: analysis and mask fabrication for contact CDs <80 nm
Levenson, M.D. ; Tan, S.M. ; Dai, G. ; Morikawa, Y. ; Hayashi, N. ; Ebihara, T.
Pub. info.: Optical Microlithography XVI.  Part One  pp.344-370,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Vortex via validation
Levenson, M.D. ; Ebihara, T. ; Morikawa, Y. ; Hayashi, N.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.93-102,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
3.

Conference Proceedings
Conference Proceedings
3. Advances in vortex via fabrication
Levenson, M.D. ; Ebihara, T.J. ; Reilly, M. ; Barclay, G. ; Vorha, V. ; Stafford, C. ; Mastovich, M.E. ; Morikawa, Y. ; Hayashi, N.
Pub. info.: Optical Microlithography XVII.  pp.1237-1246,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377