1.

Conference Proceedings
Conference Proceedings
1. Characteristics of residual products in HF gas-phase etching of sacrificial oxides for silicon micromachining
Jang,W.-I. ; Choi,C.-A. ; Lee,C.-S. ; Hong,Y.-S. ; Lee,J.-H.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.956-963,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings
Conference Proceedings
2. Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate plane
Hong,Y.-S. ; Lee,J.-H. ; Lee,C.-S. ; Jang,W.-1. ; Choi,C.-A. ; Kim,S.-H. ; Kwak,Y.-K.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.939-947,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
3.

Conference Proceedings
Conference Proceedings
3. Effect of polysilicon interface on stress in multistacked polysilicon films
Choi,C.-A. ; Lee,C.-S. ; jang,W.-1. ; Lee,J.-H. ; Shon,B.K.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.1134-1140,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680