1.

Conference Proceedings
Conference Proceedings
1. Application of substructuring method to three-dimensional optical lithography simulation
Lee,S.G. ; Seo,C.-K. ; Lee,D.-H. ; Lee,J.-U. ; Cho,M.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.795-802,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Application of an effective wavelet matrix transform approach for optical lithography simulation:analysis of topological effects of phase-shifting masks
Lee,S.G. ; Kim,H.-J. ; Lee,D.-H. ; Lee,J.-U.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.723-733,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000