1.

Conference Proceedings
Conference Proceedings
1. Optimization criteria of CMOS-compatible thermopile sensors
Du,C.-H. ; Lee,C.
Pub. info.: Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.116-126,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3893
2.

Conference Proceedings
Conference Proceedings
2. Development of TMAH anisotropic etching manufacturing process for MEMS
Tsaur,J. ; Yang,S. ; Du,C.-H. ; Lin,Z. ; Huang,C. ; Lee,C.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.142-153,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
3.

Conference Proceedings
Conference Proceedings
3. Investigation of thermopile using CMOS compatible process and front-side Si bulk etching
Du,C.-H. ; Lee,C.
Pub. info.: Micromachined Devices and Components VI.  pp.168-178,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4176