1.
Conference Proceedings
Kang, S.-K. ; Ko, D.-H. ; Ahn, T.H. ; Yeo, I.S. ; Lee, K.C. ; Lee, T.W. ; Lee, Y.H.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium . pp.581-590, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-2
2.
Conference Proceedings
Kang, S.-K. ; Kim, J.J. ; Ko, D.-H. ; Ahn, T.H. ; Yeo, I.S. ; Lee, T.W. ; Lee, Y.H.
Pub. info.:
Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. . 2002. Warrendale, PA. Materials Research Society
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
670