1.

Conference Proceedings
Conference Proceedings
1. Efficient approach to improving pattern fidelity with multi-OPC model and recipe [6349-182]
Do, M. ; Kang, J. ; Choi, J. ; Lee, J. ; Lee, Y. ; Kim, K. ; Dongbu Electronics (South Korea)
Pub. info.: Photomask Technology 2006.  pp.63494P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings
Conference Proceedings
2. The effect of sub-layer condition on the OPC model [6349-181]
Choi, J. ; Kang, J. ; Shim, Y. ; Yun, K. ; Lee, J. ; Lee, Y. ; Kim, K.
Pub. info.: Photomask Technology 2006.  pp.63494O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349